JPS6155335U - - Google Patents
Info
- Publication number
- JPS6155335U JPS6155335U JP14076584U JP14076584U JPS6155335U JP S6155335 U JPS6155335 U JP S6155335U JP 14076584 U JP14076584 U JP 14076584U JP 14076584 U JP14076584 U JP 14076584U JP S6155335 U JPS6155335 U JP S6155335U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- semiconductor substrates
- treatment boat
- position detection
- handle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14076584U JPH0636575Y2 (ja) | 1984-09-17 | 1984-09-17 | 熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14076584U JPH0636575Y2 (ja) | 1984-09-17 | 1984-09-17 | 熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6155335U true JPS6155335U (en]) | 1986-04-14 |
| JPH0636575Y2 JPH0636575Y2 (ja) | 1994-09-21 |
Family
ID=30699114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14076584U Expired - Lifetime JPH0636575Y2 (ja) | 1984-09-17 | 1984-09-17 | 熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0636575Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01230246A (ja) * | 1987-11-06 | 1989-09-13 | Tel Sagami Ltd | 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート |
| JPH03159233A (ja) * | 1989-11-17 | 1991-07-09 | Tokyo Electron Ltd | 熱処理炉装置 |
-
1984
- 1984-09-17 JP JP14076584U patent/JPH0636575Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01230246A (ja) * | 1987-11-06 | 1989-09-13 | Tel Sagami Ltd | 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート |
| JPH03159233A (ja) * | 1989-11-17 | 1991-07-09 | Tokyo Electron Ltd | 熱処理炉装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0636575Y2 (ja) | 1994-09-21 |